JPH0482840U - - Google Patents
Info
- Publication number
- JPH0482840U JPH0482840U JP12559290U JP12559290U JPH0482840U JP H0482840 U JPH0482840 U JP H0482840U JP 12559290 U JP12559290 U JP 12559290U JP 12559290 U JP12559290 U JP 12559290U JP H0482840 U JPH0482840 U JP H0482840U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vertical
- support jig
- insertion position
- placement surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 9
- 230000037431 insertion Effects 0.000 claims 2
- 238000003780 insertion Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12559290U JPH0482840U (en]) | 1990-11-28 | 1990-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12559290U JPH0482840U (en]) | 1990-11-28 | 1990-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0482840U true JPH0482840U (en]) | 1992-07-20 |
Family
ID=31873184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12559290U Pending JPH0482840U (en]) | 1990-11-28 | 1990-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0482840U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014060403A (ja) * | 2013-09-24 | 2014-04-03 | Kokusai Electric Semiconductor Service Inc | 基板保持具及びウェーハ支持方法 |
-
1990
- 1990-11-28 JP JP12559290U patent/JPH0482840U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014060403A (ja) * | 2013-09-24 | 2014-04-03 | Kokusai Electric Semiconductor Service Inc | 基板保持具及びウェーハ支持方法 |